Cycle Time: 20min (Running TIME 17min TRANSFER TIME:3min)
Throughput per cycle (max) 9pcs /cycle
Throughput per hour 27pcs/hr
OPERATION TIME (H) 22hour
OPERATION DAYS 26 days
OPERATION RATE（％）80%
-Production Qty/month for
1 Machine（pcs）12,355 wafers
 
-Target Production Qty for a Month（pcs）50,000
-Equipment Qty 4 m/c
-Productivity （pcs）/Month 49,420 wafer